Patentler

Patentler:

1.      Avgerinos V. Gelatos, Olkan Cuvalci, Tong Zhang, Chen-An Chen, “HEATED CERAMIC SUBSTRATE SUPPORT WITH PROTECTIVE COATING”, US Application Number: US20050194374A1, Publication Date: 09/02/2008, US Application.

 

2.       Olkan Cuvalci, Yu Chang, William Kuang, Anqing Cui, Seshadri Ganguli, “PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUCCESSION OF VOLTAGE DROP ELEMENTS”, US Application Number: US20100096085A1, Publication Date: 04/22/2010, US Application

 

3.      Olkan Cuvalci, Dien-Yeh Wu, Xiaoxiong Yuan, “CHEMICAL PRECURSOR AMPOULE FOR VAPOR DEPOSITION PROCESSES”, US Application Number: US20100112215A1, Publication Date: 05/06/2010, US Application

 

 

4.      Wei Ti Lee, Lai Ta, Srinivas Guggilla, Kevin Moraes, Olkan Cuvalci, Regan Young, John Mazzocco, “SUBSTRATE PROCESSING SYSTEM AND METHODS THEREOF”, US Application Number: US20100304027A1, Publication date: 12/02/2010, US Application